Materials Reliability In Microelectronics
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Materials Reliability In Microelectronics Vi Volume 428
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Author : William F. Filter
language : en
Publisher:
Release Date : 1996-11-18
Materials Reliability In Microelectronics Vi Volume 428 written by William F. Filter and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996-11-18 with Technology & Engineering categories.
MRS books on materials reliability in microelectronics have become the snapshot of progress in this field. Reduced feature size, increased speed, and larger area are all factors contributing to the continual performance and functionality improvements in integrated circuit technology. These same factors place demands on the reliability of the individual components that make up the IC. Achieving increased reliability requires an improved understanding of both thin-film and patterned-feature materials properties and their degradation mechanisms, how materials and processes used to fabricate ICs interact, and how they may be tailored to enable reliability improvements. This book focuses on the physics and materials science of microelectronics reliability problems rather than the traditional statistical, accelerated electrical testing aspects. Studies are grouped into three large sections covering electromigration, gate oxide reliability and mechanical stress behavior. Topics include: historical summary; reliability issues for Cu metallization; characterization of electromigration phenomena; modelling; microstructural evolution and influences; oxide and device reliability; thin oxynitride dielectrics; noncontact diagnostics; stress effects in thin films and interconnects and microbeam X-ray techniques for stress measurements.
Materials Reliability In Microelectronics Iv
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Author : Materials Research Society
language : en
Publisher: Materials Research Society
Release Date : 1994-01-01
Materials Reliability In Microelectronics Iv written by Materials Research Society and has been published by Materials Research Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994-01-01 with Technology & Engineering categories.
Materials Reliability In Microelectronics Vii Volume 473
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Author : J. Joseph Clement
language : en
Publisher:
Release Date : 1997-10-20
Materials Reliability In Microelectronics Vii Volume 473 written by J. Joseph Clement and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997-10-20 with Technology & Engineering categories.
The inexorable drive for increased integrated circuit functionality and performance places growing demands on the metal and dielectric thin films used in fabricating these circuits, as well as spurring demand for new materials applications and processes. This book directly addresses issues of widespread concern in the microelectronics industry - smaller feature sizes, new materials and new applications that challenge the reliability of new technologies. While the book continues the focus on issues related to interconnect reliability, such as electromigration and stress, particular emphasis is placed on the effects of microstructure. An underlying theme is understanding the importance of interactions among different materials and associated interfaces comprising a single structure with dimensions near or below the micrometer scale. Topics include: adhesion and fracture; gate oxide growth and oxide interfaces; surface preparation and gate oxide reliability; oxide degradation and defects; micro-structure, texture and reliability; novel measurement techniques; interconnect performance and reliability modeling; electromigration and interconnect reliability and stress and stress relaxation.
Materials Reliability In Microelectronics
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Author :
language : en
Publisher:
Release Date : 1992
Materials Reliability In Microelectronics written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1992 with Microelectronics categories.
Materials Reliability In Microelectronics Iii
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Author : Kenneth P. Rodbell
language : en
Publisher: Cambridge University Press
Release Date : 2014-06-05
Materials Reliability In Microelectronics Iii written by Kenneth P. Rodbell and has been published by Cambridge University Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-06-05 with Technology & Engineering categories.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Materials Reliability Issues In Microelectronics Volume 225
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Author : James R. Lloyd
language : en
Publisher:
Release Date : 1991-10-22
Materials Reliability Issues In Microelectronics Volume 225 written by James R. Lloyd and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1991-10-22 with Science categories.
With the increased complexity of modern integrated circuits, it is important that reliability problems be attacked properly with the appropriate tools. This volume recognizes that almost all reliability problems are materials problems, and helps to put 'reliabilty physics' on a firm scientific foundation. Topics include: electromigration; stress effects on reliability; stress and packaging; metallization; device, oxide and dielectric reliability; new investigative techniques; corrosion.
Materials Reliability In Microelectronics Ii Volume 265
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Author : C. V. Thompson
language : en
Publisher:
Release Date : 1992-09-30
Materials Reliability In Microelectronics Ii Volume 265 written by C. V. Thompson and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1992-09-30 with Technology & Engineering categories.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Materials Reliability In Microelectronics Iv
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Author : Materials Research Society. Spring Meeting
language : en
Publisher:
Release Date : 1994
Materials Reliability In Microelectronics Iv written by Materials Research Society. Spring Meeting and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with Electrodiffusion categories.
Materials Reliability In Microelectronics Ix Volume 563
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Author : Cynthia A. Volkert
language : en
Publisher: Cambridge University Press
Release Date : 1999-10-01
Materials Reliability In Microelectronics Ix Volume 563 written by Cynthia A. Volkert and has been published by Cambridge University Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999-10-01 with Technology & Engineering categories.
The continual evolution of integrated circuit architecture places ever-increasing demands on the metal and dielectric thin films used in fabricating these circuits. Not only must these materials meet performance and manufacturability requirements, they must also be highly reliable for many years under operating conditions. A thorough understanding of the failure mechanisms and the effect of processing conditions and material properties on reliability is required to achieve this, particularly if it is to be done while minimizing cost and maximizing performance. This book brings together researchers from academia and industry to discuss fundamental mechanisms and phenomena in the reliability field. Topics include: solder and barrier-layer reliability; electromigration modeling; electromigration in interconnects; advanced measurement techniques; mechanical behavior of back-end materials and adhesion and fracture.
Materials Reliability In Microelectronics Viii
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Author : John C. Bravman
language : en
Publisher:
Release Date : 1998
Materials Reliability In Microelectronics Viii written by John C. Bravman and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998 with Electrodiffusion categories.