Microelectronic Processing
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Microelectronic Processing
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Author : Walter Scot Ruska
language : en
Publisher: McGraw-Hill Companies
Release Date : 1987
Microelectronic Processing written by Walter Scot Ruska and has been published by McGraw-Hill Companies this book supported file pdf, txt, epub, kindle and other format this book has been release on 1987 with Business & Economics categories.
Microelectronic Processing Technician Course Curriculum
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Author : International Society for Hybrid Microelectronics
language : en
Publisher:
Release Date : 1987
Microelectronic Processing Technician Course Curriculum written by International Society for Hybrid Microelectronics and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1987 with Technology & Engineering categories.
Microelectronics Processing
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Author : L. A. Casper
language : en
Publisher:
Release Date : 1986
Microelectronics Processing written by L. A. Casper and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1986 with Language Arts & Disciplines categories.
Examines leading-edge developments in the field of materials development. Covers all major aspects of materials science, with applications to many high technology areas. Explores the role of chemistry in high-tech materials and their applications.
Fundamentals Of Microelectronics Processing
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Author : Hong H. Lee
language : en
Publisher: McGraw-Hill Science, Engineering & Mathematics
Release Date : 1990
Fundamentals Of Microelectronics Processing written by Hong H. Lee and has been published by McGraw-Hill Science, Engineering & Mathematics this book supported file pdf, txt, epub, kindle and other format this book has been release on 1990 with Technology & Engineering categories.
The Science And Engineering Of Microelectronic Fabrication
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Author : Stephen A. Campbell
language : en
Publisher: Oxford University Press, USA
Release Date : 2001
The Science And Engineering Of Microelectronic Fabrication written by Stephen A. Campbell and has been published by Oxford University Press, USA this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with Technology & Engineering categories.
The Science and Engineering of Microelectronic Fabrication provides a thorough introduction to the field of microelectronic processing. Geared toward a wide audience, it may be used for upper-level undergraduate or first year graduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits, including photolithography, plasma and reactive ion etching, ion implantation, diffusin, oxidation, evaporation, vapor phase epitaxial growth, sputtering, and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, non-optical lithography, molecular beam epitaxy, and metal organic chemica vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacturing of integrated circuits. The text also discusses the itnegration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The text makes use of the process simulation package SUPREM to demonstrate impurity profiles of practical interest. The new edition includes complete chapter coverage of MEMS including: Fundamentals of Mechanics, Stress in Thin Films, Mechanical to Electrical Transduction, Mechanics of Common MEMS Devices, Bulk Micromachining Etching Techniques, Bulk Micromachining Process Flow, Surface Micromachining Basics, Surface Micromachining Process Flow, MEMS Actuators, High Aspect Ratio Microsystems Technology (HARMST).
Micromachining And Microfabrication Process Technology
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Author :
language : en
Publisher:
Release Date : 1995
Micromachining And Microfabrication Process Technology written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Micromechanics categories.
Micromachining And Microfabrication Process Technology
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Author : Karen W. Markus
language : en
Publisher: SPIE-International Society for Optical Engineering
Release Date : 1995
Micromachining And Microfabrication Process Technology written by Karen W. Markus and has been published by SPIE-International Society for Optical Engineering this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Technology & Engineering categories.
The Science And Engineering Of Microelectronic Fabrication
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Author : Stephen A. Campbell
language : en
Publisher: Oxford University Press, USA
Release Date : 1996
The Science And Engineering Of Microelectronic Fabrication written by Stephen A. Campbell and has been published by Oxford University Press, USA this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996 with Technology & Engineering categories.
The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be used as a textbook for both first year graduate and upper level undergraduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, nonoptical lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacturing of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The book also makes use of the process simulation package SUPREM to demonstrate impurity profiles of practical interest.
International Microelectronic Symposium
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Author :
language : en
Publisher:
Release Date : 1975
International Microelectronic Symposium written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1975 with Hybrid integrated circuits categories.
Optical Characterization Techniques For High Performance Microelectronic Device Manufacturing
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Author :
language : en
Publisher:
Release Date : 1995
Optical Characterization Techniques For High Performance Microelectronic Device Manufacturing written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Integrated circuits categories.