Low Dielectric Constant Materials

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Handbook Of Low And High Dielectric Constant Materials And Their Applications Two Volume Set

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Author : Hari Singh Nalwa
language : en
Publisher: Elsevier
Release Date : 1999-09-07

Handbook Of Low And High Dielectric Constant Materials And Their Applications Two Volume Set written by Hari Singh Nalwa and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999-09-07 with Science categories.

Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They will play a crucial role in the future generation of IC devices (VLSI/UISI and high speed IC packaging). Considerable efforts have been made to develop new low as well as high dielectric constant materials for applications in electronics industries. Besides achieving either low or high dielectric constants, other materials' properties such as good processability, high mechanical strength, high thermal and environmental stability, low thermal expansion, low current leakage, low moisture absorption, corrosion resistant, etc., are of equal importance. Many chemical and physical strategies have been employed to get desired dielectric materials with high performance. This is a rapidly growing field of science--both in novel materials and their applications to future packing technologies. The experimental data on inorganic and organic materials having low or high dielectric constant remail scattered in the literature. It is timely, therfore, to consolidate the current knowledge on low and high dielectric constant materials into a sigle reference source. Handbook of Low and High Dielectric Constant Materials and Their Applications is aimed at bringing together under a sigle cover (in two volumes) all low and high dielectric constant materials currently studied in academic and industrial research covering all spects of inorgani an organic materials from their synthetic chemistry, processing techniques, physics, structure-property relationship to applications in IC devices. This book will summarize the current status of the field covering important scientific developments made over the past decade with contributions from internationally recognized experts from all over the world. Fully cross-referenced, this book has clear, precise, and wide appeal as an essential reference source for all those interested in low and high dielectric constant material.

Low Dielectric Constant Materials For Ic Applications

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Author : Paul S. Ho
language : en
Publisher: Springer Science & Business Media
Release Date : 2003

Low Dielectric Constant Materials For Ic Applications written by Paul S. Ho and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003 with Medical categories.

Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for

Low Dielectric Constant Materials Synthesis And Applications In Microelectronics

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Author : Toh-Ming Lu
language : en
Publisher:
Release Date : 1995

Low Dielectric Constant Materials Synthesis And Applications In Microelectronics written by Toh-Ming Lu and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Electric insulators and insulation categories.

Low Dielectric Constant Materials

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Author : Wei William Lee
language : en
Publisher:
Release Date : 1997

Low Dielectric Constant Materials written by Wei William Lee and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997 with categories.

Low Dielectric Constant Materials V Volume 565

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Author : John Hummel
language : en
Publisher: Cambridge University Press
Release Date : 2000-01-12

Low Dielectric Constant Materials V Volume 565 written by John Hummel and has been published by Cambridge University Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000-01-12 with Technology & Engineering categories.

Interest in developing low-dielectric constant materials is driven by requirements from the microelectronics sector to improve performance in interconnections by reducing parasitic capacitance and cross talk. The continuing increase in density of semiconductor devices is becoming limited by the dielectric properties of the insulator which threatens to slow the rate of productivity. The requirement for dielectric constant is rapidly approaching an e value of 2.0, with continued improvement sought even below this level to maintain this progression, commonly known as Moore's Law. Synthetic methods of obtaining materials in this range are addressed in this book. The materials solution to the interconnect problem - changing the insulator to lower the dielectric constant from 4.0, the e of silicon dioxide - introduces a host of reliability concerns, as well as changes to the process of manufacturing semiconductor devices. Topics include: porous films - organic and inorganic; porous films - organic/low-k integration; low-k integration; low-k/advanced interconnect; low-dielectric constant materials and applications in microelectronics and low-k film property/integration.

Low Dielectric Constant Materials

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Author : Materials Research Society
language : en
Publisher: Materials Research Society
Release Date : 1995-01-01

Low Dielectric Constant Materials written by Materials Research Society and has been published by Materials Research Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995-01-01 with Technology & Engineering categories.

Low And High Dielectric Constant Materials

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Author : Mark J. Lododa
language : en
Publisher: The Electrochemical Society
Release Date : 2000

Low And High Dielectric Constant Materials written by Mark J. Lododa and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Technology & Engineering categories.

Contains papers from a May 2000 symposium, representing the state of the art in areas of dielectric materials science and process integration. Papers are arranged in sections on low and high dielectric constant materials, covering topics such as ammonia plasma passivation effects on properties of post-CMP low-k HSQ, characterization of ashing effects on low-k dielectric films, and electron beam curing of thin film polymer dielectrics. Other subjects include characterization of high-k dielectrics using the non-contact surface charge profiler method, and processing effects and electrical evaluation of ZrO2 formed by RTP oxidation of Zr. Loboda is affiliated with Dow Corning Corporation. c. Book News Inc.

Low Dielectric Constant Materials Iii Volume 476

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Author : Carlye Case
language : en
Publisher:
Release Date : 1997

Low Dielectric Constant Materials Iii Volume 476 written by Carlye Case and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997 with Technology & Engineering categories.

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Handbook Of Low And High Dielectric Constant Materials And Their Applications Materials And Processing

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Author : Hari Singh Nalwa
language : en
Publisher:
Release Date : 1999

Handbook Of Low And High Dielectric Constant Materials And Their Applications Materials And Processing written by Hari Singh Nalwa and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999 with Dielectrics categories.

Study And Characterization Of Low Dielectric Constant Materials For Interlayer Dielectric Applications

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Author : Babu Narayanan
language : en
Publisher:
Release Date : 2003

Study And Characterization Of Low Dielectric Constant Materials For Interlayer Dielectric Applications written by Babu Narayanan and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003 with categories.