Introduction To Microlithography

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Introduction To Microlithography

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Author : L. F. Thompson
language : en
Publisher: Academic
Release Date : 1994

Introduction To Microlithography written by L. F. Thompson and has been published by Academic this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with Art categories.

Reviews the theory, materials, and processes used in the lithographic process by which circuit elements are fabricated (it is these elements' decreasing size that has made possible the miniaturization of electronic devices). After a brief historical introduction, four major topics are discussed: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. The new edition reflects the many changes that have occurred since the 1983 publication of this tutorial/reference. Annotation copyright by Book News, Inc., Portland, OR

Introduction To Microlithography

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Author : Larry F. Thompson
language : en
Publisher:
Release Date : 1983

Introduction To Microlithography written by Larry F. Thompson and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1983 with Fotolitografia categories.

Semiconductor Microlithography V

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Author : Jim Dey
language : en
Publisher:
Release Date : 1980

Semiconductor Microlithography V written by Jim Dey and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1980 with Technology & Engineering categories.

Evaluation Of New Zirconium Containing Single And Bilayer Resists For Use In Electron Beam Lithography

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Author : Ashwin S. Ramachandran
language : en
Publisher:
Release Date : 1992

Evaluation Of New Zirconium Containing Single And Bilayer Resists For Use In Electron Beam Lithography written by Ashwin S. Ramachandran and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1992 with categories.

Microcircuit Engineering

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Author :
language : en
Publisher:
Release Date : 1990

Microcircuit Engineering written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1990 with Integrated circuits categories.

Ieee Circuits Devices

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Author :
language : en
Publisher:
Release Date : 1994

Ieee Circuits Devices written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with Electrical engineering categories.

Microlithography

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Author : David J. Elliott
language : en
Publisher: McGraw-Hill Companies
Release Date : 1986

Microlithography written by David J. Elliott and has been published by McGraw-Hill Companies this book supported file pdf, txt, epub, kindle and other format this book has been release on 1986 with Technology & Engineering categories.

Microelectronics Technology

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Author : Elsa Reichmanis
language : en
Publisher:
Release Date : 1995

Microelectronics Technology written by Elsa Reichmanis and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Language Arts & Disciplines categories.

Provides an up-to-date assessment of chemically amplified resist materials chemistry and process considerations. Reports novel chemistry for single layer 193nm lithographic applications. Discusses new approaches to silicon-containing resists and multilevel processes. Explores the design of low-dielectric polymer materials for microelectronic applications.

Polymers For Microelectronics

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Author : L. F. Thompson
language : en
Publisher:
Release Date : 1994

Polymers For Microelectronics written by L. F. Thompson and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with Language Arts & Disciplines categories.

Developed from a symposium at the 203rd Meeting of the ACS in San Francisco, April 1992, this volume presents new information on advanced polymers for applications in the manufacture of electronic devices and systems. The 38 chapter-papers are organized in four sections: chemically amplified resists; top-surface imaging and dry development resists; electron-beam, X-ray, and photoresists; and polyimides and dielectric polymers. Annotation copyright by Book News, Inc., Portland, OR

Chemistry Of Advanced Materials

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Author : Leonard V. Interrante
language : en
Publisher: Wiley-VCH
Release Date : 1998

Chemistry Of Advanced Materials written by Leonard V. Interrante and has been published by Wiley-VCH this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998 with Science categories.

Chemistry has a vital role to play in materials processing and in the development of new materials that can meet the changing needs of today's technology. This volume addresses both the basic underlying principles and the technological relevance of major topics in advanced materials chemistry, including: * Electron transfer salt-based conductors, superconductors, and magnets * Advanced polymeric materials-functional electroactive polymers * Polymers in electronics * Chemical vapor deposition * An introduction to the nonlinear optical properties of organic materials * Nanoparticles and nanostructural materials * Nanoporous materials * Molecular precursor routes to inorganic solids * Layered transition metal oxides and chalcogenides * Biomaterials Bringing together a battery of important information in a single source, this stand-alone reference is an invaluable companion for aspiring and practicing organic, inorganic, solid-state, and surface chemists, as well as polymer and materials scientists.