Introduction To Microfabrication
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Introduction To Microfabrication
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Author : Sami Franssila
language : en
Publisher: John Wiley & Sons
Release Date : 2005-01-28
Introduction To Microfabrication written by Sami Franssila and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-01-28 with Technology & Engineering categories.
Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.
Introduction To Microfabrication
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Author : Sami Franssila
language : en
Publisher: John Wiley & Sons
Release Date : 2004-06-14
Introduction To Microfabrication written by Sami Franssila and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004-06-14 with Technology & Engineering categories.
Nanotechnology and microengineering are among the top priority research areas for the US and Europe. This text provides coverage of all aspects of the attempt to build functional devices at a molecular size.
Introduction To Microelectronic Fabrication
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Author : Richard C. Jaeger
language : en
Publisher: Pearson
Release Date : 2002
Introduction To Microelectronic Fabrication written by Richard C. Jaeger and has been published by Pearson this book supported file pdf, txt, epub, kindle and other format this book has been release on 2002 with Integrated circuit categories.
For courses in Theory and Fabrication of Integrated Circuits. The author's goal in writing this text was to present a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing, and is highlighted by careful explanations, clear, simple language, and numerous fully-solved example problems. This work assumes a minimal knowledge of integrated circuits and of terminal behavior of electronic components such as resistors, diodes, and MOS and bipolar transistors.
Microsystem Technology In Chemistry And Life Sciences
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Author : Andreas Manz
language : en
Publisher: Springer Science & Business Media
Release Date : 2003-09-05
Microsystem Technology In Chemistry And Life Sciences written by Andreas Manz and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003-09-05 with Science categories.
"WHAT DOES NOT NEED TO BE BIG, WILL BE SMALL", a word by an engineer at a recent conference on chips technology. This sentence is particularly true for chemistry. Microfabrication technology emerged from microelectronics into areas like mechanics and now chemistry and biology. The engineering of micron and submicron sized features on the surface of silicon, glass and polymers opens a whole new world. Micromotors smaller than human hair have been fabricated and they work fine. It is the declared goal of the authors to bring these different worlds together in this volume. Authors have been carefully chosen to guarantee for the quality of the contents. An engineer, a chemist or a biologist will find new impulses from the various chapters in this book.
Biomems
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Author : Simona Badilescu
language : en
Publisher: CRC Press
Release Date : 2016-04-19
Biomems written by Simona Badilescu and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016-04-19 with Medical categories.
Written to cover often overlooked areas in the field of bioMEMS, this volume bridges topics related to biomolecules and complex biological entities with those directly related to the design, fabrication, and characterization of the devices. Unlike other references, this text aids with the fundamental physicochemical understanding of biological processes relevant to the performance of various biosensing devices. Accessible to seniors and graduate students enrolled in engineering programs, the book includes problems in each chapter as well as case studies to provide real-life examples.
Moems
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Author : M. Edward Motamedi
language : en
Publisher: SPIE Press
Release Date : 2005
Moems written by M. Edward Motamedi and has been published by SPIE Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with Technology & Engineering categories.
This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.
Biochip Technology
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Author : Jing Cheng
language : en
Publisher: CRC Press
Release Date : 2003-09-02
Biochip Technology written by Jing Cheng and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003-09-02 with Science categories.
Biochip technology has experienced explosive growth in recent years and Biochip technology describes the basic manufacturing and fabrication processes and the current range of applications of these chips. Top scientists from the biochip industry and related areas explain the diverse applications of biochips in gene sequencing, expression monitoring, disease diagnosis, tumor examination, ligand assay and drug discovery.
Micro And Nanotechnology For Space Systems
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Author : Henry Helvajian
language : en
Publisher: AIAA
Release Date : 1997
Micro And Nanotechnology For Space Systems written by Henry Helvajian and has been published by AIAA this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997 with Science categories.
Microengineering and microelectromechanical systems (MEMS) are a subject of considerable current interest involving research and development throughout the world. This first volume of a series on this topic reviews and evaluates micro- and nanotechnologies applicable to U.S. Air Force and commercial space systems. It introduces the concept of application-specific integrated microinstrument (ASIM), an intelligent microinstrument.
Tribology Issues And Opportunities In Mems
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Author : Bharat Bhushan
language : en
Publisher: Springer Science & Business Media
Release Date : 1998-06-30
Tribology Issues And Opportunities In Mems written by Bharat Bhushan and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998-06-30 with Science categories.
Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the construction ofthese microdevices. These issues are based on surface phenomenaand cannotbe scaled down linearly and these become increasingly important with the small size of the devices. Continuum theory breaks down in the analyses, e. g. in fluid flow of micro-scale devices. Mechanical properties ofpolysilicon and other films are not well characterized. Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.
Micromachining And Microfabrication Process Technology
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Author :
language : en
Publisher:
Release Date : 2001
Micromachining And Microfabrication Process Technology written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with Micromechanics categories.