Diagnostic Techniques For Semiconductor Materials Processing
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Diagnostic Techniques For Semiconductor Materials Processing
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Author :
language : en
Publisher:
Release Date : 1996
Diagnostic Techniques For Semiconductor Materials Processing written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996 with Semiconductors categories.
Diagnostic Techniques For Semiconductor Materials Processing Volume 406
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Author : Stella W. Pang
language : en
Publisher:
Release Date : 1996-03-18
Diagnostic Techniques For Semiconductor Materials Processing Volume 406 written by Stella W. Pang and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996-03-18 with Technology & Engineering categories.
The fabrication of Si- and compound semiconductor-based devices involves a number of steps ranging from material growth to pattern definition by lithography, and ultimately, pattern transfer by etching/deposition. The key to device manufacturing, however, is reproducibility, low cost and high yield. Diagnostic techniques allow correlation between processing and actual device performance to be established. Researchers from universities, industry and government come together in this book to examine the advances in diagnostic techniques that provide critical information on structural, optical and electrical properties of semiconductor devices, as well as monitoring techniques for equipment/processes for control and feedback. The overriding goal is for rapid, accurate materials characterization, both in situ and ex situ. Topics include: in situ diagnostics; proximal probe microscopies; optical probes of devices and device properties; spectroscopic ellipsometry/structural diagnostics; and material analysis - X-ray techniques, strain measurements and passivation.
Symposium On Diagnostic Techniques For Semiconductor Materials Processing
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Author :
language : un
Publisher:
Release Date : 1994
Symposium On Diagnostic Techniques For Semiconductor Materials Processing written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with categories.
Diagnostic Techniques For Semiconductor Materials Processing Volume 324
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Author : O. J. Glembocki
language : en
Publisher:
Release Date : 1994-07
Diagnostic Techniques For Semiconductor Materials Processing Volume 324 written by O. J. Glembocki and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994-07 with Technology & Engineering categories.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Analytical And Diagnostic Techniques For Semiconductor Materials Devices And Processes
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Author : Bernd O. Kolbesen
language : en
Publisher:
Release Date : 1999
Analytical And Diagnostic Techniques For Semiconductor Materials Devices And Processes written by Bernd O. Kolbesen and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999 with Technology & Engineering categories.
Analytical And Diagnostic Techniques For Semiconductor Materials Devices And Processes 7
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Author : Dieter K. Schroder
language : en
Publisher: The Electrochemical Society
Release Date : 2007
Analytical And Diagnostic Techniques For Semiconductor Materials Devices And Processes 7 written by Dieter K. Schroder and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007 with Technology & Engineering categories.
Diagnostic characterization techniques for semiconductor materials, devices and device processing are addressed at this symposium. It will cover new techniques as well as advances in routine analytical technology applied to semiconductor process development and manufacture. The hardcover edition includes a CD-ROM of ECS Transactions, Volume 10, Issue 1, Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007). The PDF edition also includes the ALTECH 2007 papers.
Diagnostic Techniques For Semiconductor Materials Processing Materials Research Society Symposium Proceedings Held In Boston Massachusetts On November 29 December 2 1993
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Author : O. J. Glembocki
language : en
Publisher:
Release Date : 1994
Diagnostic Techniques For Semiconductor Materials Processing Materials Research Society Symposium Proceedings Held In Boston Massachusetts On November 29 December 2 1993 written by O. J. Glembocki and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with categories.
The symposium focused on various aspects of process diagnostics and device processing. Diagnostic techniques which were considered fell into two classes: invasive and non invasive. Optical characterization techniques were the most widely applied characterization tools used in both materials and process monitoring. Techniques such as reflectance difference, ellipsometry, reflectance, absorption, light scattering, photoreflectance, Raman scattering and thermal wave modulated reflectance were shown to be powerful probes of various materials properties. The materials properties that were probed included surface stoichiometry and morphology, etch damage, Fermi level pinning position and thin film properties such as thickness, alloy content, and interfacial roughness. Real time diagnostics such as ellipsometry and reflectance difference were shown to be sensitive tools of materials properties during processing.
Semiconductor Materials Analysis And Fabrication Process Control Proceedings Of Symposium D On Diagnostic Techniques For Semiconductor Materials Analysis And Fabrication Process Control Of The 1992 E Mrs Spring Conference Strasbourg France June 2 5 1992
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Author : G. M. Crean
language : en
Publisher:
Release Date : 1993
Semiconductor Materials Analysis And Fabrication Process Control Proceedings Of Symposium D On Diagnostic Techniques For Semiconductor Materials Analysis And Fabrication Process Control Of The 1992 E Mrs Spring Conference Strasbourg France June 2 5 1992 written by G. M. Crean and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1993 with categories.
Semiconductor Characterization
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Author : W. Murray Bullis
language : en
Publisher: American Institute of Physics
Release Date : 1996
Semiconductor Characterization written by W. Murray Bullis and has been published by American Institute of Physics this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996 with Science categories.
Market: Those in government, industry, and academia interested in state-of-the-art knowledge on semiconductor characterization for research, development, and manufacturing. Based on papers given at an International Nist Workshop in January 1995, Semiconductor Characterization covers the unique characterization requirements of both silicon IC development and manufacturing, and compound semiconductor materials, devices, and manufacturing. Additional sections discuss technology trends and future requirements for compound semiconductor applications. Also highlighted are recent developments in characterization, including in- situ, in-FAB, and off-line analysis methods. The book provides a concise, effective portrayal of industry needs and problems in the important specialty of metrology for semiconductor technology.
In Situ Process Diagnostics And Modeling Volume 569
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Author : Orlando Auciello
language : en
Publisher:
Release Date : 1999-08-11
In Situ Process Diagnostics And Modeling Volume 569 written by Orlando Auciello and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999-08-11 with Technology & Engineering categories.
Papers from an April 1999 symposium demonstrate the need for the development and application of a variety of complementary in situ, real-time characterization techniques to advance the science and technology of thin films and interfaces critical to the development of a new generation of thin-film-based devices. Papers are arranged in sections on in situ ion and electron-beam analysis, in situ spectroscopic ellipsometry and other optical characterization, in situ diagnostics and modeling, in situ emission and optical characterization techniques, and in situ X-ray, TEM, and STM/AFM characterization and processing control. Auciello is affiliated with Argonne National Laboratory. Annotation copyrighted by Book News, Inc., Portland, OR