Database Needs For Modeling And Simulation Of Plasma Processing

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Database Needs For Modeling And Simulation Of Plasma Processing

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Author : National Research Council
language : en
Publisher: National Academies Press
Release Date : 1996-10-21

Database Needs For Modeling And Simulation Of Plasma Processing written by National Research Council and has been published by National Academies Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996-10-21 with Science categories.

In spite of its high cost and technical importance, plasma equipment is still largely designed empirically, with little help from computer simulation. Plasma process control is rudimentary. Optimization of plasma reactor operation, including adjustments to deal with increasingly stringent controls on plant emissions, is performed predominantly by trial and error. There is now a strong and growing economic incentive to improve on the traditional methods of plasma reactor and process design, optimization, and control. An obvious strategy for both chip manufacturers and plasma equipment suppliers is to employ large-scale modeling and simulation. The major roadblock to further development of this promising strategy is the lack of a database for the many physical and chemical processes that occur in the plasma. The data that are currently available are often scattered throughout the scientific literature, and assessments of their reliability are usually unavailable. Database Needs for Modeling and Simulation of Plasma Processing identifies strategies to add data to the existing database, to improve access to the database, and to assess the reliability of the available data. In addition to identifying the most important needs, this report assesses the experimental and theoretical/computational techniques that can be used, or must be developed, in order to begin to satisfy these needs.

Database Needs For Modeling And Simulation Of Plasma Processing

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Author : NATIONAL RESEARCH COUNCIL WASHINGTON DC.
language : en
Publisher:
Release Date : 1996

Database Needs For Modeling And Simulation Of Plasma Processing written by NATIONAL RESEARCH COUNCIL WASHINGTON DC. and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996 with categories.

In Situ Process Diagnostics And Modeling Volume 569

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Author : Orlando Auciello
language : en
Publisher:
Release Date : 1999-08-11

In Situ Process Diagnostics And Modeling Volume 569 written by Orlando Auciello and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999-08-11 with Technology & Engineering categories.

Papers from an April 1999 symposium demonstrate the need for the development and application of a variety of complementary in situ, real-time characterization techniques to advance the science and technology of thin films and interfaces critical to the development of a new generation of thin-film-based devices. Papers are arranged in sections on in situ ion and electron-beam analysis, in situ spectroscopic ellipsometry and other optical characterization, in situ diagnostics and modeling, in situ emission and optical characterization techniques, and in situ X-ray, TEM, and STM/AFM characterization and processing control. Auciello is affiliated with Argonne National Laboratory. Annotation copyrighted by Book News, Inc., Portland, OR

Diagnostic Studies And Modeling Of Inductively Coupled Plasmas

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Author : Cheng-Che Hsu
language : en
Publisher:
Release Date : 2006

Diagnostic Studies And Modeling Of Inductively Coupled Plasmas written by Cheng-Che Hsu and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006 with categories.

Atomic And Molecular Data And Their Applications

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Author : Evelyne Roueff
language : en
Publisher: American Institute of Physics
Release Date : 2007-04-20

Atomic And Molecular Data And Their Applications written by Evelyne Roueff and has been published by American Institute of Physics this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-04-20 with Science categories.

This book contains papers presented at the International Conference on Atomic and Molecular Data and their Applications. This conference provides a forum for the interaction of Atomic and Molecular (AM) data producers and users and for information exchange on AM data needs and availability, AM data activities and databases worldwide.

Experimental Studies Of Inductively Coupled Plasmas

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Author : Harmeet Singh
language : en
Publisher:
Release Date : 2000

Experimental Studies Of Inductively Coupled Plasmas written by Harmeet Singh and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with categories.

Ibm Journal Of Research And Development

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Author :
language : en
Publisher:
Release Date : 1999

Ibm Journal Of Research And Development written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999 with Computers categories.

News Report

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Author :
language : en
Publisher:
Release Date : 1997

News Report written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997 with Science categories.

Proceedings Of The National Academy Of Sciences Of The United States Of America

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Author : National Academy of Sciences (U.S.)
language : en
Publisher:
Release Date : 2000

Proceedings Of The National Academy Of Sciences Of The United States Of America written by National Academy of Sciences (U.S.) and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Science categories.

Atomic Processes In Plasmas Eleventh Aps Topical Conference

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Author : Michael S. Pindzola
language : en
Publisher: American Institute of Physics
Release Date : 1998-10-16

Atomic Processes In Plasmas Eleventh Aps Topical Conference written by Michael S. Pindzola and has been published by American Institute of Physics this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998-10-16 with Science categories.

The proceedings of the Eleventh APS Topical Conference on Atomic Processes in Plasmas benchmarks the ongoing research developments in the interdisciplinary interaction between atomic and plasma physicists as they tackle large scale applied research problems in magnetic fusion, x-ray lasers, astrophysics, inertial fusion, and materials processing.